Title: Molecular beam epitaxy growth of superconducting tantalum germanide

Abstract: Developing new material platforms for use in superconductor-semiconductor hybrid structures is desirable due to limitations caused by intrinsic microwave losses present in commonly used III/V material systems. With the recent reports that tantalum provides drastic improvements when implemented in superconducting circuit elements over traditional Nb and Al films, exploring Ta as an alternative superconductor in hybrid material systems seems necessary. Here, we present our study on the growth of Ta on semiconducting Ge (001) substrates grown via molecular beam epitaxy. We show that the Ta diffuses into the Ge matrix in a self-limiting nature resulting in extremely smooth and abrupt surfaces and interfaces that are ideal for future cQED device fabrication. The films have a nominal composition of TaGe$_{2}$ and form a native oxide of nominal composition Ta$_{2}$Ge$_{2}$O$_{5}$ that also forms a sharp interface with the underlying film. These films are superconducting with a $T_{C}\sim 1.8-2$K and $H_{C}^{\perp} \sim 1.88T$, $H_{C}^{\parallel} \sim 5.1T$.