Title: Tuning the thermal conductivity of Si membrane using nanopillars: from crystalline to amorphous pillars

Abstract: Tuning thermal transport in nanostructures is essential for many applications, such as thermal management and thermoelectrics. Nanophononic metamaterials (NPM) have shown great potential for reducing thermal conductivity by introducing local resonant hybridization. In this work, the thermal conductivity of NPM with crystalline Si (c-Si) pillar, crystalline Ge (c-Ge) pillar and amorphous Si (a-Si) pillar are systematically investigated by molecular dynamics method. The analyses of phonon dispersion and spectral energy density show that phonon dispersions of Si membrane are flattened due to local resonant hybridization induced by both crystalline and amorphous pillar. In addition, a-Si pillar can cause larger reduction of thermal conductivity compared with c-Si pillar. Specifically, when increasing the atomic mass of atoms in pillars, the thermal conductivity of NPMs with crystalline pillar is increased because of the weakened phonon hybridization, however, the thermal conductivity of NPMs with amorphous pillar is almost unchanged, which indicates that the phonon transports are mainly affected by the scatterings at the interface between amorphous pillar and Si membrane. The results of this work can provide meaningful insights on controlling thermal transport in NPMs by choosing the materials and atomic mass of pillars for specific applications.